Fig.5-29 MG spectrometer installed in (d) a TEM and (e) emission spectra from ITO

Fig.5-29 MG spectrometer installed in (d) a TEM and (e) emission spectra from ITO

The MG spectrometer better resolves the fine structure of the spectra, such as the Sn-Lα and In-Lβ1 peaks, than conventional EDS.

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