Fig.1 Reaction of O2 molecules at the SiO2/Si interface
(a) Time evolution of representative Si 2p spectra. (b) O2 incorporated from the SiO2 surface diffuses through the SiO2 before reaching the SiO2/Si interface. (c) Direct reaction of O2 with Si-Si bonds requires high energy. (d) In our model, the reaction proceeds via molecular adsorption on defects at the interface. Such a reaction requires no energy.
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